X-Y and Z Stages, and Motion Controller:
The X-Y and Z stages, and the motion control components, are available only as part of the jetlab™ system. Standard X-Y stages are 30 cm x 20 cm (12 in x 8 in.). Smaller sizes are available as an option and up to a 30 cm x 30 cm X-Y stages can be accommodated on the workstation. The X-Y stages are equipped with linear encoders used for position maintenance. The positioning accuracies are ±10 µm, with repeatabilities about ±2 µm.